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Vacuum coating machine classification

Author: ComeFrom: Date:2020-12-01 14:11:38 Hits:1736
What is the classification of the vacuum coating machine? 

What is your understanding for the classification of vacuum coating machine? 

Vacuum coating machine mainly refers to a kind of coating which needs to be carried out under high vacuum, 

including vacuum ion evaporation coating machine, magnetron sputtering coating machine, 

MBE molecular beam epitaxial coating machine and PLD laser sputtering deposition coating machine, etc. 

It is mainly divided into evaporation and sputtering. 


The object that needs to be coated in the vacuum coating machine is called the substrate, 

and the plated material is the target. The substrate and the target are in the vacuum chamber together.

Evaporation coating is usually to heat the target to vaporize the surface components in the form of atomic groups or 

ions, and settle on the substrate surface to form a film through the process of film formation.

   

The vacuum coating machine can be simply understood as bombarding the target by electron or high energy laser, 

sputtering the surface components in the form of atomic groups or ions, and finally depositing on the substrate 

surface, experiencing the film forming process and film is formed. 

The furnace body can choose a double-layer water-cooled structure made of stainless steel, carbon steel 

or their combination. 


According to the process requirements, different specification and types of coating machine are selected, 

such as resistance evaporation vacuum coating machine, electron beam evaporation vacuum coating machine, 

magnetron sputtering vacuum coating machine, ion coating vacuum coating machine, magnetron 

reactive sputtering vacuum coating machine,

hollow cathode ion coating and multi-arc ion coating. Fixture operation forms as:  self-rotation, revolation, 

and revolation +self-revolation. 

The user can make requirements according to the size and shape of the piece. 



The user can put forward the corresponding requirements according to the size and shape of the piece. 

The speed range and rotation accuracy of the rotation are: ordinary adjustable 

and frequency conversion speed regulation.

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