1), fixed cylinder 3 cylinder shape, large diameter, thick wall structure design and to the symmetry of the fixed way, to ensure that it has enough strength and rigidity. At the same time, but also prevent high-temperature sputtering abrasive to its internal parts pollution, ensuring the poking disc rotation flexibility.
      2), circular bearing seat 2 design, ensure the bearing seat installed seal and verticality; shaft diameter size increases, increase the bearing seat 2 two bearing installation space, improve its strength and rigidity to ensure the consistency of the rotation axis in the process of stiffness and the toggle plate 15 rotation flexibility, position and repeat.
      3), loading the transposition mechanism, by enlargement of the bearing plate 16 diameter, so that the body in the plane direction increases the effective area, installation of large diameter (phi 26.5mm) comparison, is conducive to the optical path adjustment and improve the quality of optical thin film; comparison 12 by the monolithic glass as a than a piece unit, compare the spatial superposition installation, glass superposition installation to realize a can be placed 50-100 tablets tablets was compared in a comparison of the storage cylinder 13, solve coater coating of multilayer precision optical thin film, compared to the number of less influence coating layers and the accuracy of.
      4), a positioning disc 6 and groove type photocoupler, the through groove type photocoupler to location aware disk three score of 120 DEG slit, to control the rotation of the motor to stop. The consistency of 1 axis rotary positioning repeat is guaranteed, the dialing plate 15 to achieve accurate pick action.
      5), a rotary sealed feeding mechanism introduced Wilson sealing mechanism 5, both to ensure motor through gear drive shaft 1 flexible rotation, and ensure that the vacuum chamber of the sealing action of the external. Optimization design of vacuum coating machine multi chip chip device, which is characterized by: (1) has the advantages of simple structure, high strength, good reliability; (2) comparison sheet loading quantity, improve production efficiency, plating of ultra precision optical multilayer film; (3) comparison diameter increases, improve the accuracy of the monitoring of thin film, reduce the system hardware requirements, the system is easy to realize automatic control; (4) maintenance maintenance costs low.
By optimizing the design of vacuum coating machine multi chip comparison device to ensure the comparison sheet structure paddles rotation flexibility and repetitive consistency, solve the effective area is small, optical path adjustment is not convenient, optical signal to noise than the poor, and solve the comparison sheet carrying fewer problems, can make the existing vacuum coating machine quality of the optical film plating to greatly improve, and more than 30 layers of optical thin film can be plated finish. Practice has proved that the structure of this comparison is useful and can be popularized and implemented in the modern optical vacuum coating industry,